Polycrystalline Silicon Ingot Casting Furnace
I. Usage:
This equipment is vertical with such functions as high vacuum, inflation and high-temperature melting directional solidification and so on.
It is the preferred furnace for melting silicon and making silicon ingots. Meanwhile, after added with the plasma heat source, it can meet
part of the purification requirements
II. Characteristics:
1. Short production cycle of each furnace :Heating and melting can be completed within 16 hours, crystallization process 25 hours,
tempering 3 hours, and cooling 12 hours. The total time is within 56 hours.
2. low maintenance costs.
3. Easy replacement of thermal field, the thermal field with up and down split is easy to replace.
4. Safer due to a variety of protective measures, so far it has been found that no security incidents caused by silicon leakage
happened after user’s operation.
5. High degree of automation, using PLC + HMI (human machine interface) to achieve that one set to complete the whole process.
6. Patented structure makes larger temperature gradient from top to bottom.
It makes larger temperature difference from top to bottom in the thermal field to use patented ingot structure. Meanwhile ingot casting
has purifying ability, even if the raw material is 4N, it can produce more than 5N polysilicon.
III. Main Technical Parameters
|
Model
|
Name
|
Rated
power
|
Rated
temperature
|
Crucible
volume
(liquid)
|
Directed
solidification
speed
|
Cold
ultimate
vacuum
|
|
ZT-3D
|
Poly-silicon dual-chamber directional
solidification furnace
|
100KW
|
1600C
|
3KG
|
5-25mm/hour
|
6.67×10-3Pa
|
|
ZT-90D
|
Poly-silicon directional
solidification furnace
|
160KW
|
1600C
|
90kg
|
5-25mm/hour
|
6.67×10-3Pa
|
|
ZT-270D
|
Poly-silicon directional
solidification furnace
|
185KW
|
1600C
|
270KG
|
5-25mm/hour
|
6.67×10-1Pa
|
|
ZT-450D
|
Poly-silicon directional
solidification furnace
|
200KW
|
1600C
|
450KG
|
5-25mm/hour
|
6.67×10-1Pa
|
IV. Structure Description
With vertical structure, it is made of furnace body, heat sensor heating (users can choose resistance heating as the heat body),
insulation layer, directed crystallizer, moving elevating gear，operating platform , pneumatic system, power supply with its control
system, and vacuum system.
1. The furnace shell is double layer water cooling head structure, stainless steel(304 or 316L) of inner layer is precisely polished and outer
layer is carbon steel for rust protection.
2. The furnace shell is equipped with rotary observation window and explosion-proof holes, with the blowing blender at the top and lifting
structure to meet the purification requirements.
3. The furnace hearth is under dual water-cooled head-sealed layer structure with polishing stainless steel (No.304 or No.316L material)
inner layer and high-quality anti-proof carbon steel outer layer. The hearth and the body are connected actively, and the hearth’s lifting is
controlled by hydraulic pressure.
4. The insulation layer is composed by the hard carbon felt, and is supported on the insulation layer. There is an air exit hole in the
middle of upper insulation layer, and the graphite heating element is wrapped by the insulation layer beside the crucible. Users afford
the quartz crucible themselves.
5. The sensor is abnormal shaped copper coil which has multi-turn circle structure. The coil connects the furnace body through insulating
columns, and the coil connects the copper bars through clicking.
6. The moving lifting structure is divided into fast one and slow one to ensure the smooth lifting. The moving speed can be adjusted from 5
to 25mm per hour, and the displacement is shown by linear potentiometer(or Optical grating).
7. The vacuum system is made of a mechanical pump, diffusion pump, oil diffusion pump, pneumatic valves, piping baffle and so on.
8. The temperature control loop is made of temperature controller and thermocouple, which directly controls the DC voltage and power, and
the lifting speed is adjusted by the frequency or servo.The controller is made by Honeywell in US, or Yuguang in China, with multisegment
programcontrol. Displacement is instructed by digital display meter. The electric control cabinet is the Siemens standard one, and the
panel is equipped with graphic simulation screen which indicates the current operation conditions of various components. The motion
control is provided by a Omron PLC programmable equipment.
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